Analysis of Multi-Micromirrors Tilt Error in Space-Modulated Fourier Transform Infrared Spectrometry

	Analysis of Multi-Micromirrors Tilt Error in Space-Modulated Fourier Transform Infrared Spectrometry
	Zheng Y.; Liang J. Q.; Liang Z. Z.
	2012
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	32 期号:7 页码:1999-2002
摘要	The system of space-modulated Fourier transform infrared spectrometer without moving parts is stable and compact, moreover, it can realize the on-line monitoring and real-time detection. The position accuracy of multi-micromirrors as the key components has a great influence on spectrometric performance. In the present paper, the multi-mcromirrors tilt error caused by optical path difference changes was calculated and simulated. The analysis shows that, as the multi-micromirrors tilt angle increased, the interference pattern contrast decreased and the signal to noise ratio reduced. The results could be used in the tolerance distribution and the systemic alignment in the next step.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34075
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zheng Y.,Liang J. Q.,Liang Z. Z.. Analysis of Multi-Micromirrors Tilt Error in Space-Modulated Fourier Transform Infrared Spectrometry[J]. Spectroscopy and Spectral Analysis,2012,32(7):1999-2002.
APA	Zheng Y.,Liang J. Q.,&Liang Z. Z..(2012).Analysis of Multi-Micromirrors Tilt Error in Space-Modulated Fourier Transform Infrared Spectrometry.Spectroscopy and Spectral Analysis,32(7),1999-2002.
MLA	Zheng Y.,et al."Analysis of Multi-Micromirrors Tilt Error in Space-Modulated Fourier Transform Infrared Spectrometry".Spectroscopy and Spectral Analysis 32.7(2012):1999-2002.

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