The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition

	The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition
其他题名	论文其他题名
	Li B. S.; Liu Y. C.; Zhi Z. Z.; Shen D. Z.; Lu Y. M.; Zhang J. Y.; Fan X. W.
	2002
发表期刊	Journal of Crystal Growth
ISSN	0022-0248
卷号	240 期号:3—4 页码:479-483
摘要	High-quality ZnO thin films have been grown on a Si(100) substrate by plasma-enhanced chemical vapor deposition (PECVD) using a zinc organic source (Zn(C2H5)(2)) and carbon dioxide (CO2) gas mixtures at a temperature of 180degreesC. A strong free exciton emission with a weak defect-band emission in the visible region is observed. The characteristics of photoluminescence (PL) of ZnO, as well as the exciton absorption peak in the absorption spectra, are closely related to the gas flow rate ratio of Zn(C2H5)(2) to CO2. Full-widths at half-maximum of the free exciton emission as narrow as 93.4 meV have been achieved. Based on the temperature dependence of the PL spectra from 83 to 383 K, the exciton binding energy and the transition energy of free excitons at 0 K were estimated to be 59.4 meV and 3.36 eV, respectively. (C) 2002 Elsevier Science B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26848
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li B. S.,Liu Y. C.,Zhi Z. Z.,et al. The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition[J]. Journal of Crystal Growth,2002,240(3—4):479-483.
APA	Li B. S..,Liu Y. C..,Zhi Z. Z..,Shen D. Z..,Lu Y. M..,...&Fan X. W..(2002).The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition.Journal of Crystal Growth,240(3—4),479-483.
MLA	Li B. S.,et al."The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition".Journal of Crystal Growth 240.3—4(2002):479-483.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Li-2002-The photolum（159KB）			开放获取	--	浏览下载