Using diffractive optical element and Zygo interferometer to test large-aperture convex surface

	Using diffractive optical element and Zygo interferometer to test large-aperture convex surface
其他题名	论文其他题名
	Liu H.; Lu Z. W.; Li F. Y.
	2005
发表期刊	Optics and Laser Technology
ISSN	0030-3992
卷号	37 期号:8 页码:642-646
摘要	A valid method for measuring the large-aperture convex surface by using a curved diffractive optical element (DOE) and a Zygo interferometer is demonstrated experimentally. In this method, the direct use of source and high-resolution CCD camera of Zygo interferometer represents a major advance in the areas of adjustment. The DOE, fabricated by combining laser direct writing and lithography, results in higher accuracy, efficiency and lower cost for testing aspheric compared with other types of DOE employed. We have fabricated one optical test system and measured a 110-mm-diameter convex surface of errors 44.3 nm rms and 311 nm P V. (c) 2004 Elsevier Ltd. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26818
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu H.,Lu Z. W.,Li F. Y.. Using diffractive optical element and Zygo interferometer to test large-aperture convex surface[J]. Optics and Laser Technology,2005,37(8):642-646.
APA	Liu H.,Lu Z. W.,&Li F. Y..(2005).Using diffractive optical element and Zygo interferometer to test large-aperture convex surface.Optics and Laser Technology,37(8),642-646.
MLA	Liu H.,et al."Using diffractive optical element and Zygo interferometer to test large-aperture convex surface".Optics and Laser Technology 37.8(2005):642-646.

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