Dynamic scaling phenomena and universality classes in growth of iron nitride thin films deposited by direct current magnetron sputtering

	Dynamic scaling phenomena and universality classes in growth of iron nitride thin films deposited by direct current magnetron sputtering
其他题名	论文其他题名
	Wang X.; Zheng W. T.; Wang L. L.; Tian H. W.; Yu S. S.; Meng F. L.; Li X. T.; Kong X. G.
	2005
发表期刊	Thin Solid Films
ISSN	0040-6090
卷号	492 期号:1—2 页码:75-78
摘要	In this paper, dynamic scaling approach has been used to investigate the growth of iron nitride films, which were deposited by direct current magnetron sputtering using an Ar/N-2 gas mixture (N-2/(N-2+Ar)=30%) at room temperature and 250 degrees C substrate temperature. The structure of the deposited films was determined by using X-ray diffraction. The perpendicular fluctuations in the height h (x, t) of the surface were analyzed by atomic force microscopy and grazing incidence X-ray scattering in the light of dynamical scaling approach, and the two dependent nontrivial exponents, roughness exponent a and growth exponent beta, were determined. For the iron nitride films grown at room temperature and 250 degrees C, alpha =0.39 +/- 0.01 and 0.30 +/- 0.02 and beta =0.29 +/- 0.03 and 0.28 +/- 0.07, respectively, which were in agreement with a type of universality that was suggested by Kardar, Parisi and Zhang. It might be concluded that it was desorption rather than the surface diffusion that dominated the relaxation process in both the case of room and higher substrate temperatures for the deposition of iron nitride thin films. (c) 2005 Elsevier B.V All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26800
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang X.,Zheng W. T.,Wang L. L.,et al. Dynamic scaling phenomena and universality classes in growth of iron nitride thin films deposited by direct current magnetron sputtering[J]. Thin Solid Films,2005,492(1—2):75-78.
APA	Wang X..,Zheng W. T..,Wang L. L..,Tian H. W..,Yu S. S..,...&Kong X. G..(2005).Dynamic scaling phenomena and universality classes in growth of iron nitride thin films deposited by direct current magnetron sputtering.Thin Solid Films,492(1—2),75-78.
MLA	Wang X.,et al."Dynamic scaling phenomena and universality classes in growth of iron nitride thin films deposited by direct current magnetron sputtering".Thin Solid Films 492.1—2(2005):75-78.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Wang-2005-Dynamic sc（124KB）			开放获取	--	浏览下载