CIOMP OpenIR  > 中科院长春光机所知识产出
Electrical and structural properties of p-type ZnO : N thin films prepared by plasma enhanced chemical vapour deposition
其他题名论文其他题名
Xiao Z. Y.; Liu Y. C.; Zhang J. Y.; Zhao D. X.; Lu Y. M.; Shen D. Z.; Fan X. W.
2005
发表期刊Semiconductor Science and Technology
ISSN0268-1242
卷号20期号:8页码:796-800
摘要Thin films of p-type ZnO:N have been obtained by thermally oxidizing zinc oxynitride films prepared by plasma enhanced chemical vapour deposition (PECVD). The p-type ZnO:N thin film with a hole concentration of 2.7 x 1016 cm(-3) was obtained after an annealing process was conducted at 600 degrees C. A conductivity transition from n-type to p-type was observed, which was systematically researched via structural and compositional analyses. In terms of these analyses, it helped to better understand the properties and behaviour of nitrogen in ZnO. First, nitrogen was incorporated into ZnO films during the growth process to occupy oxygen positions, and also partly compensated some donors induced from non-stoichiometric (ZnO1-x) composition. Second, the amount of activated nitrogen gradually increased in an oxidizing atmosphere and exceeded those donor states to realize an effective compensation, yielding p-type conductivity during the course of thermal oxidation.
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/26770
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Xiao Z. Y.,Liu Y. C.,Zhang J. Y.,et al. Electrical and structural properties of p-type ZnO : N thin films prepared by plasma enhanced chemical vapour deposition[J]. Semiconductor Science and Technology,2005,20(8):796-800.
APA Xiao Z. Y..,Liu Y. C..,Zhang J. Y..,Zhao D. X..,Lu Y. M..,...&Fan X. W..(2005).Electrical and structural properties of p-type ZnO : N thin films prepared by plasma enhanced chemical vapour deposition.Semiconductor Science and Technology,20(8),796-800.
MLA Xiao Z. Y.,et al."Electrical and structural properties of p-type ZnO : N thin films prepared by plasma enhanced chemical vapour deposition".Semiconductor Science and Technology 20.8(2005):796-800.
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Xiao-2005-Electrical(328KB) 开放获取--浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Xiao Z. Y.]的文章
[Liu Y. C.]的文章
[Zhang J. Y.]的文章
百度学术
百度学术中相似的文章
[Xiao Z. Y.]的文章
[Liu Y. C.]的文章
[Zhang J. Y.]的文章
必应学术
必应学术中相似的文章
[Xiao Z. Y.]的文章
[Liu Y. C.]的文章
[Zhang J. Y.]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Xiao-2005-Electrical and struc.pdf
格式: Adobe PDF
此文件暂不支持浏览
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。