Preparation and characterization of ZnO particles embedded in SiO2 matrix by reactive magnetron sputtering

	Preparation and characterization of ZnO particles embedded in SiO2 matrix by reactive magnetron sputtering
其他题名	论文其他题名
	Ma J. G.; Liu Y. C.; Xu C. S.; Liu Y. X.; Shao C. L.; Xu H. Y.; Zhang J. Y.; Lu Y. M.; Shen D. Z.; Fan X. W.
	2005
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	97 期号:10
摘要	ZnO particles embedded in SiO2 thin films were prepared by a radio-frequency magnetron sputtering technique. X-ray diffraction (XRD) and optical-absorption spectra showed that ZnO particles with hexagonal wurtzite structure had been embedded in the SiO2 matrix, and the size of ZnO particles increased with increasing annealing temperature from 773 to 973 K. Raman-scattering and Fourier transform infrared (FTIR) spectrum measurements also confirmed the presence of ZnO particles. When the annealing temperature was lower than 973 K, room-temperature photoluminescence (PL) spectra showed dominative deep-level emissions in the visible region and very weak ultraviolet emissions. As the annealing temperature increased to 973 K, an emission band in the ultraviolet region besides the emissions from free and bound excitons recombination was observed in the low-temperature PL spectra. The origin of the ultraviolet emission bands was discussed with the help of temperature-dependent PL spectra. When the annealing temperature was higher than 973 K, Zn2SiO4 particles were formed, as shown by XRD and FTIR results. (c) 2005 American Institute of Physics.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26757
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ma J. G.,Liu Y. C.,Xu C. S.,et al. Preparation and characterization of ZnO particles embedded in SiO2 matrix by reactive magnetron sputtering[J]. Journal of Applied Physics,2005,97(10).
APA	Ma J. G..,Liu Y. C..,Xu C. S..,Liu Y. X..,Shao C. L..,...&Fan X. W..(2005).Preparation and characterization of ZnO particles embedded in SiO2 matrix by reactive magnetron sputtering.Journal of Applied Physics,97(10).
MLA	Ma J. G.,et al."Preparation and characterization of ZnO particles embedded in SiO2 matrix by reactive magnetron sputtering".Journal of Applied Physics 97.10(2005).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Ma-2005-Preparation （334KB）			开放获取	--	浏览下载