Imaging quality analysis of a KBA x-ray microscope working at grazing incidence

	Imaging quality analysis of a KBA x-ray microscope working at grazing incidence
其他题名	论文其他题名
	Hu J. S.; Zhao L. L.; Li X.; Bai Y. H.
	2006
发表期刊	Optical Engineering
ISSN	0091-3286
卷号	45 期号:4
摘要	In the last 20 years, x-ray imaging technology has developed to meet the needs of x-ray photoetching, spatial exploration, high-energy physics, and diagnosis of inertial confinement fusion. Because conventional imaging methods are not suitable in the x-ray range, grazing reflective imaging and coded aperture imaging methods have been adopted. In this paper, we describe the design of a noncoaxial grazing incidence KBA microscope. The microscope consists of two sets of spherical mirrors that scatter in orthogonal planes. An optical ray tracing program is used to analyze and evaluate the theoretical aberrations of the microscope. This allows us to optimize the x-ray imaging system. The analytical results provide a reliable foundation for determining the useful range and the manufacturing and assembly tolerances of the microscope. (c) 2006 Society of Photo-Optical Instrumentation Engineers.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26726
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Hu J. S.,Zhao L. L.,Li X.,et al. Imaging quality analysis of a KBA x-ray microscope working at grazing incidence[J]. Optical Engineering,2006,45(4).
APA	Hu J. S.,Zhao L. L.,Li X.,&Bai Y. H..(2006).Imaging quality analysis of a KBA x-ray microscope working at grazing incidence.Optical Engineering,45(4).
MLA	Hu J. S.,et al."Imaging quality analysis of a KBA x-ray microscope working at grazing incidence".Optical Engineering 45.4(2006).

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