A method for undercut formation of integrated shadow mask used in passive matrix displays

	A method for undercut formation of integrated shadow mask used in passive matrix displays
其他题名	论文其他题名
	Huang Z. H.; Qi G. J.; Zeng X. T.; Su W. M.
	2006
发表期刊	Thin Solid Films
ISSN	0040-6090
卷号	503 期号:1—2 页码:246-249
摘要	This paper reports a method for making integrated shadow masks used in fabrication of passive matrix organic light emitting diode (OLED) displays. Common positive and negative photoresist were employed to produce retrograded strip pillars with large overhang and undercut by a special photolithography procedure. The pillar strips serve as all effective shadow mask for patterning the organic layers and the metal cathodes in passive OLED display devices. Such an integrated shadow mask is viable for large deposition angle up to 70 degrees. The method is also expected to be usable for fabricating more complicated structures for other applications. (c) 2005 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26684
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Huang Z. H.,Qi G. J.,Zeng X. T.,et al. A method for undercut formation of integrated shadow mask used in passive matrix displays[J]. Thin Solid Films,2006,503(1—2):246-249.
APA	Huang Z. H.,Qi G. J.,Zeng X. T.,&Su W. M..(2006).A method for undercut formation of integrated shadow mask used in passive matrix displays.Thin Solid Films,503(1—2),246-249.
MLA	Huang Z. H.,et al."A method for undercut formation of integrated shadow mask used in passive matrix displays".Thin Solid Films 503.1—2(2006):246-249.

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