Fabrication of a curved linear grating by using a laser direct writer system

	Fabrication of a curved linear grating by using a laser direct writer system
其他题名	论文其他题名
	Zhang H. X.; Lu Z. W.; Li F. Y.
	2006
发表期刊	Optics Communications
ISSN	0030-4018
卷号	266 期号:1 页码:249-252
摘要	We present the lithography technique to fabricate a curved linear grating by using a Cartesian coordinates laser direct writer (LDW) system. The grating with the period of 15 mu m is made on the convex lens surface. This is a new application of the LDW system. After the chromium coating and the photoresist removing procedures, a convex reflecting grating is obtained. (c) 2006 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26675
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang H. X.,Lu Z. W.,Li F. Y.. Fabrication of a curved linear grating by using a laser direct writer system[J]. Optics Communications,2006,266(1):249-252.
APA	Zhang H. X.,Lu Z. W.,&Li F. Y..(2006).Fabrication of a curved linear grating by using a laser direct writer system.Optics Communications,266(1),249-252.
MLA	Zhang H. X.,et al."Fabrication of a curved linear grating by using a laser direct writer system".Optics Communications 266.1(2006):249-252.