Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique | |
其他题名 | 论文其他题名 |
Zhang H. M.; Ma C. S.; Qin Z. K.; Zhang X. Z.; Zhang D.; Liu S. Y.; Zhang D. M. | |
2007 | |
发表期刊 | Thin Solid Films |
ISSN | 0040-6090 |
卷号 | 515期号:18页码:7313-7317 |
摘要 | An efficient vapor-redissolution technique is used to greatly reduce sidewall scattering loss in the polymer arrayed waveguide grating (AWG) fabricated on a silicon substrate. Smoother sidewalls are achieved and verified by a scanning electron microscopy. Reduction of sidewall scattering loss is further measured for the loss measurement of both straight waveguides and AWG devices. The sidewall loss in straight polymer waveguide is decreased by 2.1 dB/cm, the insertion loss of our AWG device is reduced by about 5.5 dB for the central channel and 6.7 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the vapor-redissoluton treatment. (C) 2007 Elsevier B.V. All rights reserved. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/26641 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Zhang H. M.,Ma C. S.,Qin Z. K.,et al. Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique[J]. Thin Solid Films,2007,515(18):7313-7317. |
APA | Zhang H. M..,Ma C. S..,Qin Z. K..,Zhang X. Z..,Zhang D..,...&Zhang D. M..(2007).Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique.Thin Solid Films,515(18),7313-7317. |
MLA | Zhang H. M.,et al."Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique".Thin Solid Films 515.18(2007):7313-7317. |
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