Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique

	Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique
其他题名	论文其他题名
	Zhang H. M.; Ma C. S.; Qin Z. K.; Zhang X. Z.; Zhang D.; Liu S. Y.; Zhang D. M.
	2007
发表期刊	Thin Solid Films
ISSN	0040-6090
卷号	515 期号:18 页码:7313-7317
摘要	An efficient vapor-redissolution technique is used to greatly reduce sidewall scattering loss in the polymer arrayed waveguide grating (AWG) fabricated on a silicon substrate. Smoother sidewalls are achieved and verified by a scanning electron microscopy. Reduction of sidewall scattering loss is further measured for the loss measurement of both straight waveguides and AWG devices. The sidewall loss in straight polymer waveguide is decreased by 2.1 dB/cm, the insertion loss of our AWG device is reduced by about 5.5 dB for the central channel and 6.7 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the vapor-redissoluton treatment. (C) 2007 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26641
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang H. M.,Ma C. S.,Qin Z. K.,et al. Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique[J]. Thin Solid Films,2007,515(18):7313-7317.
APA	Zhang H. M..,Ma C. S..,Qin Z. K..,Zhang X. Z..,Zhang D..,...&Zhang D. M..(2007).Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique.Thin Solid Films,515(18),7313-7317.
MLA	Zhang H. M.,et al."Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique".Thin Solid Films 515.18(2007):7313-7317.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Zhang-2007-Reduction（1116KB）			开放获取	--	浏览下载