Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique

	Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique
其他题名	论文其他题名
	Xu Y.; Gao J. S.; Zheng X. M.; Wang X. Y.; Wang T. T.; Chen H.
	2007
发表期刊	Journal of Luminescence
ISSN	0022-2313
卷号	122 页码:908-910
摘要	Indian-tin-oxide ITO transparent conductive films were deposited by the Reactive low-voltage ion plating (RLVIP) technique. CO2 and O-2 gases were used as reactive gases coming into the vacuum. The effect of the CO2 gas flow rate on the optical and electrical properties of the ITO films was studied in detail. The results showed that the CO2 gas had similar oxidizing action to O-2 except for the magnitude of the flow rate. But, the conductivity of ITO films were not sensitive to the CO2 gas flow rate over a wide region in contrast to the results to O-2. The optical transmission in the visible spectral region as well as the infrared reflectivity of ITO films varied as the CO2 flow rate changed. Thus, a better quality ITO film was obtained by the RLVIP technique with reactive gas of 30 seem CO2, having of more than 90% transmittance, above 80% reflectance in long-wave IR and 28.7 Omega/rectangle sheet resistance. (c) 2006 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26601
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xu Y.,Gao J. S.,Zheng X. M.,et al. Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique[J]. Journal of Luminescence,2007,122:908-910.
APA	Xu Y.,Gao J. S.,Zheng X. M.,Wang X. Y.,Wang T. T.,&Chen H..(2007).Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique.Journal of Luminescence,122,908-910.
MLA	Xu Y.,et al."Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique".Journal of Luminescence 122(2007):908-910.

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