Fabrication of Yb3+: Er3+ co-doped Al2O3 ridge waveguides by the dry etching

	Fabrication of Yb3+: Er3+ co-doped Al2O3 ridge waveguides by the dry etching
其他题名	论文其他题名
	Song Q.; Gao J. S.; Wang X. Y.; Chen H.; Zheng X. M.; Wang T. T.; Li C. R.; Song C. L.
	2007
发表期刊	Optical Engineering
ISSN	0091-3286
卷号	46 期号:4
摘要	We present the fabrication process of straightridge Yb3+: Er3+ co-doped Al2O3 waveguides. Thin films are synthesized on silica-on-silicon wafers by middle frequency sputtering (MFS) and microwave ECR (MW-ECR) plasma source deposition. Waveguides are developed by reactive plasma etching employing BCl3 gas. Photoluminescence (PL) spectrum and gain measurements at 1.53 mu m are investigated at room temperature: a net gain of 5.225 dB/cm is achieved from a 10.5-mm-long waveguide obtained by MFS, and 0.043 dB/cm is achieved from a MW-ECR with a 980-nm pump power of 62 mW. (c) 2007 Society of Photo-Optical Instrumentation Engineers.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26538
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song Q.,Gao J. S.,Wang X. Y.,et al. Fabrication of Yb3+: Er3+ co-doped Al2O3 ridge waveguides by the dry etching[J]. Optical Engineering,2007,46(4).
APA	Song Q..,Gao J. S..,Wang X. Y..,Chen H..,Zheng X. M..,...&Song C. L..(2007).Fabrication of Yb3+: Er3+ co-doped Al2O3 ridge waveguides by the dry etching.Optical Engineering,46(4).
MLA	Song Q.,et al."Fabrication of Yb3+: Er3+ co-doped Al2O3 ridge waveguides by the dry etching".Optical Engineering 46.4(2007).

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