Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Design and fabrication of a micro-optic switch | |
其他题名 | 论文其他题名 |
Li W.; Liang J. Q.; Liang Z. Z.; Li X. Q.; Wang W. B.; Zhong Y. C.; Sun D. G. | |
2008 | |
发表期刊 | Optics Express |
ISSN | 1094-4087 |
卷号 | 16期号:9页码:6324-6330 |
摘要 | In this paper, a polyimide cantilever micro-optic switch of electromagnetic actuation is studied. The model of the electromagnetic actuation is proposed and simulated using finite element method. The best efficiency of electromagnetic force for switching operations is obtained and the parameters of the coil and magnet are determined. During the practical fabrication, the thick resist patterning and electroplating technology is employed to fabricate the electromagnetic actuation. Both the theoretical and experimental results indicate that the balanceable distance of the polyimide cantilever for implementing optical switches is about 1.28 mm with 0.4 A current pulse input, The final experimental results of optical performance for the fabricated micro-optic 1 x 4 switch include the switching time of about 20 ms and the insertion loss of about 0.73 dB. (c) 2008 Optical Society of America. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/26459 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Li W.,Liang J. Q.,Liang Z. Z.,et al. Design and fabrication of a micro-optic switch[J]. Optics Express,2008,16(9):6324-6330. |
APA | Li W..,Liang J. Q..,Liang Z. Z..,Li X. Q..,Wang W. B..,...&Sun D. G..(2008).Design and fabrication of a micro-optic switch.Optics Express,16(9),6324-6330. |
MLA | Li W.,et al."Design and fabrication of a micro-optic switch".Optics Express 16.9(2008):6324-6330. |
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