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Design and fabrication of a micro-optic switch
其他题名论文其他题名
Li W.; Liang J. Q.; Liang Z. Z.; Li X. Q.; Wang W. B.; Zhong Y. C.; Sun D. G.
2008
发表期刊Optics Express
ISSN1094-4087
卷号16期号:9页码:6324-6330
摘要In this paper, a polyimide cantilever micro-optic switch of electromagnetic actuation is studied. The model of the electromagnetic actuation is proposed and simulated using finite element method. The best efficiency of electromagnetic force for switching operations is obtained and the parameters of the coil and magnet are determined. During the practical fabrication, the thick resist patterning and electroplating technology is employed to fabricate the electromagnetic actuation. Both the theoretical and experimental results indicate that the balanceable distance of the polyimide cantilever for implementing optical switches is about 1.28 mm with 0.4 A current pulse input, The final experimental results of optical performance for the fabricated micro-optic 1 x 4 switch include the switching time of about 20 ms and the insertion loss of about 0.73 dB. (c) 2008 Optical Society of America.
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/26459
专题中科院长春光机所知识产出
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GB/T 7714
Li W.,Liang J. Q.,Liang Z. Z.,et al. Design and fabrication of a micro-optic switch[J]. Optics Express,2008,16(9):6324-6330.
APA Li W..,Liang J. Q..,Liang Z. Z..,Li X. Q..,Wang W. B..,...&Sun D. G..(2008).Design and fabrication of a micro-optic switch.Optics Express,16(9),6324-6330.
MLA Li W.,et al."Design and fabrication of a micro-optic switch".Optics Express 16.9(2008):6324-6330.
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