Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents

	Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents
其他题名	论文其他题名
	Meng L. J.; Gao J. S.; Teixeira V.; dos Santos M. P.
	2008
发表期刊	Physica Status Solidi a-Applications and Materials Science
ISSN	1862-6300
卷号	205 期号:8 页码:1961-1966
摘要	Indium tin oxide (IT) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80-120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion beam current (80 mA) show an almost amorphous structure. As the ion beam current is increased, films show a preferred orientation along the (222) direction. AFM measurements show that the surface RMS roughness of the film increases as the current goes up. The optical properties have been studied by measuring the transmittance. It has been found that the film prepared at 100 mA current has the highest transmittance. The optical constants of the films have been calculated by fitting the transmittance. The Hall measurements also showed that the film prepared at 100 mA current has one of the lowere electrical resistivities. FTIR measurements show that the film prepared at 100 mA current has the highest infra-red reflectance. All the measurements show the 100 mA ion beam current can produce good quality ITO films. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26447
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Meng L. J.,Gao J. S.,Teixeira V.,et al. Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents[J]. Physica Status Solidi a-Applications and Materials Science,2008,205(8):1961-1966.
APA	Meng L. J.,Gao J. S.,Teixeira V.,&dos Santos M. P..(2008).Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents.Physica Status Solidi a-Applications and Materials Science,205(8),1961-1966.
MLA	Meng L. J.,et al."Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents".Physica Status Solidi a-Applications and Materials Science 205.8(2008):1961-1966.

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