Oxygen flux influence on the morphological, structural and optical properties of Zn(1-x)Mg(x)O thin films grown by plasma-assisted molecular beam epitaxy

	Oxygen flux influence on the morphological, structural and optical properties of Zn(1-x)Mg(x)O thin films grown by plasma-assisted molecular beam epitaxy
其他题名	论文其他题名
	Su S. C.; Lu Y. M.; Zhang Z. Z.; Li B. H.; Shen D. Z.; Yao B.; Zhang J. Y.; Zhao D. X.; Fan X. W.
	2008
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	254 期号:15 页码:4886-4890
摘要	The Zn(1-x)Mg(x)O thin films were grown on Al(2)O(3) substrate with various O(2) flow rates by plasma-assisted molecular beam epitaxy (P-MBE). The growth conditions were optimized by the characterizations of morphology, structural and optical properties. The Mg content of the Zn(1-x)Mg(x)O thin film increases monotonously with decreasing the oxygen flux. X-ray diffractometer (XRD) measurements show that all the thin films are preferred (0 0 2) orientated. By transmittance and absorption measurements, it was found that the band gap of the film decreases gradually with increasing oxygen flow rate. The surface morphology dependent on the oxygen flow rate was also studied by field emission scanning electron microscopy (FE-SEM). The surface roughness became significant with increasing oxygen flow rate, and the nanostructures were formed at the larger flow rate. The relationship between the morphology and the oxygen flow rate of Zn(1-x)Mg(x)O films was discussed. (C) 2008 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26399
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Su S. C.,Lu Y. M.,Zhang Z. Z.,et al. Oxygen flux influence on the morphological, structural and optical properties of Zn(1-x)Mg(x)O thin films grown by plasma-assisted molecular beam epitaxy[J]. Applied Surface Science,2008,254(15):4886-4890.
APA	Su S. C..,Lu Y. M..,Zhang Z. Z..,Li B. H..,Shen D. Z..,...&Fan X. W..(2008).Oxygen flux influence on the morphological, structural and optical properties of Zn(1-x)Mg(x)O thin films grown by plasma-assisted molecular beam epitaxy.Applied Surface Science,254(15),4886-4890.
MLA	Su S. C.,et al."Oxygen flux influence on the morphological, structural and optical properties of Zn(1-x)Mg(x)O thin films grown by plasma-assisted molecular beam epitaxy".Applied Surface Science 254.15(2008):4886-4890.

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