Fabrication of micro electromagnetic actuator of high energy density

	Fabrication of micro electromagnetic actuator of high energy density
其他题名	论文其他题名
	Zhang T.; Zhang P.; Li H. W.; Wu Y. H.; Liu Y. S.
	2008
发表期刊	Materials Chemistry and Physics
ISSN	0254-0584
卷号	108 期号:2—3 页码:325-330
摘要	This paper introduced a new technology to fabricate electromagnetic actuator of high energy density without enclosed magnetic circuit. This technology includes fabricating multi-turns planar microcoils and the thick magnetic (NiFe) core on the silicon wafer. The multi-turns planar microcoils were fabricated by the electroplating method from surface to along the line and dynamically controlling the current density of the copper electrolytes. In order to fabricate thick magnetic plating, the adhesion properties between the NiFe plating and the silicon substrates were improved by changing the surface roughness of silicon substrates and increasing the thickness of seed layer. Lastly, the micro electromagnetic actuator was tested and the energy density of actuator was evaluated by the force of testing. Experiment shows this microactuator is efficient in producing magnetic energy density, magnetic force and has flexibility in application. (C) 2007 Elsevier B.V.. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26396
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang T.,Zhang P.,Li H. W.,et al. Fabrication of micro electromagnetic actuator of high energy density[J]. Materials Chemistry and Physics,2008,108(2—3):325-330.
APA	Zhang T.,Zhang P.,Li H. W.,Wu Y. H.,&Liu Y. S..(2008).Fabrication of micro electromagnetic actuator of high energy density.Materials Chemistry and Physics,108(2—3),325-330.
MLA	Zhang T.,et al."Fabrication of micro electromagnetic actuator of high energy density".Materials Chemistry and Physics 108.2—3(2008):325-330.

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