Characteristics of cubic MgZnO thin films grown by radio frequency reaction magnetron co-sputtering

	Characteristics of cubic MgZnO thin films grown by radio frequency reaction magnetron co-sputtering
其他题名	论文其他题名
	Han S.; Shen D. Z.; Zhang J. Y.; Zhao Y. M.; Jiang D. Y.; Ju Z. G.; Zhao D. X.; Yao B.
	2009
发表期刊	Journal of Alloys and Compounds
ISSN	0925-8388
卷号	485 期号:1—2 页码:794-797
摘要	Cubic MgZnO thin films were prepared on fused quartz substrate by radio frequency (rf) reaction magnetron co-sputtering technique, and composition modulation of cubic MgZnO films could be accomplished by changing rf power on Zn metal target. During growth process crystal quality of our MgZnO films can be improved by increasing the ratio Of O(2)/Ar. Unlike reported growth of (1 1 1) plane cubic MgZnO films, our cubic MgZnO films show (2 0 0) plane growth properties. This phenomenon was assigned to a preferred selection growth characteristic of MgZnO on non-crystalline quartz substrate. Band gaps of cubic MgZnO films calculated by empirical formula are different from that obtained in the absorption spectrum. It is suggested that parts of Mg do not contribute to the band gaps of Mg(x)Zn(1-x)O thin films. (C) 2009 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26319
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Han S.,Shen D. Z.,Zhang J. Y.,et al. Characteristics of cubic MgZnO thin films grown by radio frequency reaction magnetron co-sputtering[J]. Journal of Alloys and Compounds,2009,485(1—2):794-797.
APA	Han S..,Shen D. Z..,Zhang J. Y..,Zhao Y. M..,Jiang D. Y..,...&Yao B..(2009).Characteristics of cubic MgZnO thin films grown by radio frequency reaction magnetron co-sputtering.Journal of Alloys and Compounds,485(1—2),794-797.
MLA	Han S.,et al."Characteristics of cubic MgZnO thin films grown by radio frequency reaction magnetron co-sputtering".Journal of Alloys and Compounds 485.1—2(2009):794-797.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Han-2009-Characteris（530KB）			开放获取	--	浏览下载