Manufacturing and testing of a cubic SiC surface

	Manufacturing and testing of a cubic SiC surface
其他题名	论文其他题名
	Yan F.; Fan D.; Zhang B. Z.; Yin L. H.; Li R. G.; Zhang X. J.
	2009
发表期刊	Chinese Optics Letters
ISSN	1671-7694
卷号	7 期号:6 页码:534-536
摘要	The free surface and unrotational-symmetric surface optical elements have been applied more and more widely along with the development of optical design technology, although they are still difficult for manufacturing. In this letter, a SiC unrotational-symmetric aspheric surface whose surface equation is z = 3 lambda(x(3) + y(3)) (lambda = 0.6328 mu m) has been introduced. The tilt abstraction is adopted to minimize the material removal. The surface figures are peak-to-valley (PV) value of 0.327 lambda and root-mean-square (RMS) value of 0.023 lambda. A non-null testing method based on digital mask is proposed to test this surface. The accuracy of the method is testified by the experiment of standard sphere testing.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26271
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yan F.,Fan D.,Zhang B. Z.,et al. Manufacturing and testing of a cubic SiC surface[J]. Chinese Optics Letters,2009,7(6):534-536.
APA	Yan F.,Fan D.,Zhang B. Z.,Yin L. H.,Li R. G.,&Zhang X. J..(2009).Manufacturing and testing of a cubic SiC surface.Chinese Optics Letters,7(6),534-536.
MLA	Yan F.,et al."Manufacturing and testing of a cubic SiC surface".Chinese Optics Letters 7.6(2009):534-536.

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