Dwell time algorithm in ion beam figuring

	Dwell time algorithm in ion beam figuring
其他题名	论文其他题名
	Wu J. F.; Lu Z. W.; Zhang H. X.; Wang T. S.
	2009
发表期刊	Applied Optics
ISSN	0003-6935
卷号	48 期号:20 页码:3930-3937
摘要	To get a high-precision optical surface, the deconvolved. process of dwell time was transferred to a matrix equation in which the damped factor and the extra removal amount were introduced to expand the freedom of solution. A path weight factor and a surface error weight factor were used to take the scanning path and the initial surface error into account. Combined with the Gerchberg bandlimited extrapolation algorithm for initial surface error map extension, a high-precision final surface could be obtained within a factual aperture. Two surface error maps were calculated to rms = 0.1 nm from rms = 130.23 nm and to rms = 0.08 nm from rms = 282.74 nm. The simulations show that a perfect dwell time solution could be obtained by the revised matrix equation and initial surface error map extension with the help of the least squares QR (LSQR) algorithm. (C) 2009 Optical Society of America
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26248
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wu J. F.,Lu Z. W.,Zhang H. X.,et al. Dwell time algorithm in ion beam figuring[J]. Applied Optics,2009,48(20):3930-3937.
APA	Wu J. F.,Lu Z. W.,Zhang H. X.,&Wang T. S..(2009).Dwell time algorithm in ion beam figuring.Applied Optics,48(20),3930-3937.
MLA	Wu J. F.,et al."Dwell time algorithm in ion beam figuring".Applied Optics 48.20(2009):3930-3937.

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