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Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient
其他题名论文其他题名
Liu W. W.; Yao B.; Li Y. F.; Li B. H.; Zheng C. J.; Zhang B. Y.; Shan C. X.; Zhang Z. Z.; Zhang J. Y.; Shen D. Z.
2009
发表期刊Applied Surface Science
ISSN0169-4332
卷号255期号:13-14页码:6745-6749
摘要Un-doped ZnO and MgZnO thin films were deposited on c-plane sapphire substrates by molecular-beam epitaxy (MBE) and subsequently annealed in hydrogen ambient at 200-500 degrees C with a step of 100 degrees C. Hall-effect measurements show that annealing temperature has great effect on the electrical property of both ZnO and MgZnO films. The electron concentration of both ZnO and MgZnO films increases with annealing temperature ranging from 200 degrees C to 400 degrees C, and then decreases, which is attributed to incorporation of H into ZnO as a shallower donor during the annealing process and change of solid solubility of hydrogen in ZnO and MgZnO films with annealing temperature. The D(0)X emission is related to the hydrogen in MgZnO film and the donor level of the H is estimated to be 33.5 meV. It is also found that the controversial luminescence band at 3.310 eV can be formed in un-doped ZnO film upon annealing and its intensity increases with increasing annealing temperature, implying that this band may be not related to p-type doping. (C) 2009 Elsevier B.V. All rights reserved.
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/26242
专题中科院长春光机所知识产出
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GB/T 7714
Liu W. W.,Yao B.,Li Y. F.,et al. Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient[J]. Applied Surface Science,2009,255(13-14):6745-6749.
APA Liu W. W..,Yao B..,Li Y. F..,Li B. H..,Zheng C. J..,...&Shen D. Z..(2009).Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient.Applied Surface Science,255(13-14),6745-6749.
MLA Liu W. W.,et al."Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient".Applied Surface Science 255.13-14(2009):6745-6749.
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