Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

	Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region
其他题名	论文其他题名
	Lin H.; Zhang L. C.; Jin C. S.; Zhou H. J.; Huo T. L.
	2009
发表期刊	Chinese Optics Letters
ISSN	1671-7694
卷号	7 期号:3 页码:180-182
摘要	We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26231
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lin H.,Zhang L. C.,Jin C. S.,et al. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region[J]. Chinese Optics Letters,2009,7(3):180-182.
APA	Lin H.,Zhang L. C.,Jin C. S.,Zhou H. J.,&Huo T. L..(2009).Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region.Chinese Optics Letters,7(3),180-182.
MLA	Lin H.,et al."Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region".Chinese Optics Letters 7.3(2009):180-182.

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