Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering

	Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering
其他题名	论文其他题名
	Pan H. L.; Yang T.; Yao B.; Deng R.; Sui R. Y.; Gao L. L.; Shen D. Z.
	2010
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	256 期号:14 页码:4621-4625
摘要	A series of ZnO1-xSx alloy films (0 <= x <= 1) were grown on quartz substrates by radio-frequency (rf) magnetron sputtering of ZnS ceramic target, using oxygen and argon as working gas. X-ray diffraction measurement shows that the ZnO1-xSx films have wurtzite structure with (0 0 2) preferential orientation in O-rich side (O <= x <= 0.23) and zinc blende structure with (1 1 1) preferential orientation in S-rich side (0.77 <= x <= 1). However, when the S content is in the range of 0.23 < x < 0.77, the ZnO1-xSx film consists of two phases of wurtzite and zinc blende or amorphous ZnO1-xSx phase. The band gap energy of the films shows non-linear dependence on the S content, with an optical bowing parameter of about 2.9 eV. The photoluminescence (PL) measurement reveals that the PL spectrum of the wurtzite ZnO1-xSx is dominated by visible band and its PL intensity and intensity ratio of UV to visible band decrease greatly compared with undoped ZnO. All as-grown ZnO1-xSx films behave insulating, but show n-type conductivity for w-ZnO1-xSx and maintain insulating properties for beta-ZnO1-xSx after annealed. Mechanisms of effects of S on optical and electrical properties of the ZnO1-xSx alloy are discussed in the present work. (C) 2010 Elsevier B. V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26191
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Pan H. L.,Yang T.,Yao B.,et al. Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering[J]. Applied Surface Science,2010,256(14):4621-4625.
APA	Pan H. L..,Yang T..,Yao B..,Deng R..,Sui R. Y..,...&Shen D. Z..(2010).Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering.Applied Surface Science,256(14),4621-4625.
MLA	Pan H. L.,et al."Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering".Applied Surface Science 256.14(2010):4621-4625.

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