Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering

	Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering
其他题名	论文其他题名
	Sui Y. R.; Yao B.; Yang J. H.; Cui H. F.; Huang X. M.; Yang T.; Gao L. L.; Deng R.; Shen D. Z.
	2010
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	256 期号:9 页码:2726-2730
摘要	B-N codoped p-type ZnO thin films have been realized by radio frequency (rf) magnetron sputtering using a mixture of argon and oxygen as sputtering gas. Types of conduction and electrical properties in codoped ZnO films were found to be dependent on oxygen partial pressure ratios in the sputtering gas mixture. When oxygen partial pressure ratio was 70%, the codoped ZnO film showed p-type conduction and had the best electrical properties. Additionally, the p-ZnO/n-Si heterojunction showed a clear p-n diode characteristic. XRD results indicate that the B-N codoped ZnO film prepared in 70% oxygen partial pressure ratio has high crystal quality with (0 0 2) preferential orientation. Meanwhile, the B-N codoped ZnO film has high optical quality and displays the stronger near band edge (NBE) emission in the temperature-dependent photoluminescence spectrum, the acceptor energy level was estimated to be located at 125 meV above the valence band. (C) 2009 Elsevier B. V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26180
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Sui Y. R.,Yao B.,Yang J. H.,et al. Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering[J]. Applied Surface Science,2010,256(9):2726-2730.
APA	Sui Y. R..,Yao B..,Yang J. H..,Cui H. F..,Huang X. M..,...&Shen D. Z..(2010).Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering.Applied Surface Science,256(9),2726-2730.
MLA	Sui Y. R.,et al."Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering".Applied Surface Science 256.9(2010):2726-2730.

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