Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering | |
其他题名 | 论文其他题名 |
Sui Y. R.; Yao B.; Yang J. H.; Cui H. F.; Huang X. M.; Yang T.; Gao L. L.; Deng R.; Shen D. Z. | |
2010 | |
发表期刊 | Applied Surface Science |
ISSN | 0169-4332 |
卷号 | 256期号:9页码:2726-2730 |
摘要 | B-N codoped p-type ZnO thin films have been realized by radio frequency (rf) magnetron sputtering using a mixture of argon and oxygen as sputtering gas. Types of conduction and electrical properties in codoped ZnO films were found to be dependent on oxygen partial pressure ratios in the sputtering gas mixture. When oxygen partial pressure ratio was 70%, the codoped ZnO film showed p-type conduction and had the best electrical properties. Additionally, the p-ZnO/n-Si heterojunction showed a clear p-n diode characteristic. XRD results indicate that the B-N codoped ZnO film prepared in 70% oxygen partial pressure ratio has high crystal quality with (0 0 2) preferential orientation. Meanwhile, the B-N codoped ZnO film has high optical quality and displays the stronger near band edge (NBE) emission in the temperature-dependent photoluminescence spectrum, the acceptor energy level was estimated to be located at 125 meV above the valence band. (C) 2009 Elsevier B. V. All rights reserved. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/26180 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Sui Y. R.,Yao B.,Yang J. H.,et al. Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering[J]. Applied Surface Science,2010,256(9):2726-2730. |
APA | Sui Y. R..,Yao B..,Yang J. H..,Cui H. F..,Huang X. M..,...&Shen D. Z..(2010).Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering.Applied Surface Science,256(9),2726-2730. |
MLA | Sui Y. R.,et al."Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering".Applied Surface Science 256.9(2010):2726-2730. |
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