Annealing effect on crystallization behavior of cubic MgxZn1-xO films on A-plane and M-plane sapphire

	Annealing effect on crystallization behavior of cubic MgxZn1-xO films on A-plane and M-plane sapphire
其他题名	论文其他题名
	Han S.; Shen D. Z.; Zhang J. Y.; Zhao Y. M.; Jiang D. Y.; Ju Z. G.; Zhao D. X.; Yao B.
	2010
发表期刊	Vacuum
ISSN	0042-207X
卷号	84 期号:9 页码:1149-1153
摘要	Cubic MgxZn1-xO thin films with Mg composition around 70% were deposited on A-plane and M-plane sapphire substrates by rf-reactive magnetron sputtering. Measured structural and optical properties of these thin films indicated an optimal annealing temperature of 700 degrees C which produced high quality cubic MgZnO thin films on both substrates. Moreover, when the annealing temperature exceeded 750 degrees C, a much rougher surface resulted, and several large mosaic particles on the surface of the annealed films appeared. From EDX results, the Mg composition was lower than that found in other sections of the annealed films. We attributed this to thermally induced reconstruction of the crystallites. This phenomenon was more obvious for annealed MgZnO films on A-plane sapphire than that on M-plane sapphire. Thermal expansion mismatch with the substrate is the principal reason. (C) 2010 Elsevier Ltd. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26174
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Han S.,Shen D. Z.,Zhang J. Y.,et al. Annealing effect on crystallization behavior of cubic MgxZn1-xO films on A-plane and M-plane sapphire[J]. Vacuum,2010,84(9):1149-1153.
APA	Han S..,Shen D. Z..,Zhang J. Y..,Zhao Y. M..,Jiang D. Y..,...&Yao B..(2010).Annealing effect on crystallization behavior of cubic MgxZn1-xO films on A-plane and M-plane sapphire.Vacuum,84(9),1149-1153.
MLA	Han S.,et al."Annealing effect on crystallization behavior of cubic MgxZn1-xO films on A-plane and M-plane sapphire".Vacuum 84.9(2010):1149-1153.

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