Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering | |
其他题名 | 论文其他题名 |
Zhao T. T.; Yang T.; Yao B.; Cong C. X.; Sui Y. R.; Xing G. Z.; Sun Y.; Su S. C.; Zhu H.; Shen D. Z. | |
2010 | |
发表期刊 | Thin Solid Films |
ISSN | 0040-6090 |
卷号 | 518期号:12页码:3289-3292 |
摘要 | Lithium (Li) and nitrogen (N) dual-doped ZnO films with wurtzite structure were prepared by radio-frequency magnetron sputtering ZnO target with Li(3)N in growth ambient of pure Ar and the mixture of Ar and O(2), respectively, and then post annealing techniques. The film showed week p-type conductivity as the ambient was pure Ar, but stable p-type conductivity with a hole concentration of 3.46 x 10(17) cm(-3), Hall mobility of 5.27 cm(2)/Vs and resistivity of 3.43 Omega cm when the ambient is the mixture of Ar and O(2) with the molar ratio of 60:1. The stable p-type conductivity is due to substitution of Li for Zn (Li(Zn)) and formation of complex of interstitial Li (Li(i)) and substitutional N at O site, the former forms a Li(Zn) acceptor, and the latter depresses compensation of Li(i) donor for Li(Zn) acceptor. The level of the Li(Zn) acceptor is estimated to be 131.6 meV by using temperature-dependent photoluminescence spectrum measurement and Haynes rule. Mechanism about the effect of the ambient on the conductivity is discussed in the present work. (C) 2009 Elsevier B.V. All rights reserved. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/26154 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Zhao T. T.,Yang T.,Yao B.,et al. Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering[J]. Thin Solid Films,2010,518(12):3289-3292. |
APA | Zhao T. T..,Yang T..,Yao B..,Cong C. X..,Sui Y. R..,...&Shen D. Z..(2010).Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering.Thin Solid Films,518(12),3289-3292. |
MLA | Zhao T. T.,et al."Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering".Thin Solid Films 518.12(2010):3289-3292. |
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