Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

	Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography
其他题名	论文其他题名
	Zhang D. Y.; Yu W. X.; Wang T. S.; Lu Z. W.; Sun Q. A.
	2010
发表期刊	Optics Express
ISSN	1094-4087
卷号	18 期号:14 页码:15009-15016
摘要	We demonstrate the fabrication of diffractive optical elements (DOEs) on 3-Dimensional curved surfaces by capillary force lithography (CFL). Curved gratings with a period of 20 mu m and 820nm have been successfully fabricated in polymer on concave surfaces by CFL. The experiment results indicate that the capillary force lithography is an effective method to replicate DOEs on curved surfaces with a very high fidelity and a relatively fast speed. In addition, we found that the growth rate of the polymer in the sub-microfabrication is much faster and the step height is much closer to the master than that in the microfabrication for CFL, which makes CFL more attractive in the fabrication of DOEs with a sub-microscale or even nanoscale feature size than a microscale feature size. (C) 2010 Optical Society of America
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26110
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang D. Y.,Yu W. X.,Wang T. S.,et al. Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography[J]. Optics Express,2010,18(14):15009-15016.
APA	Zhang D. Y.,Yu W. X.,Wang T. S.,Lu Z. W.,&Sun Q. A..(2010).Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography.Optics Express,18(14),15009-15016.
MLA	Zhang D. Y.,et al."Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography".Optics Express 18.14(2010):15009-15016.

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