SURFACE-ROUGHNESS OBSERVATION BY SCANNING-TUNNELING-MICROSCOPY USING A MONOLITHIC PARALLEL SPRING

	SURFACE-ROUGHNESS OBSERVATION BY SCANNING-TUNNELING-MICROSCOPY USING A MONOLITHIC PARALLEL SPRING
其他题名	论文其他题名
	Zhang H. C.; Sasaki A.; Fukaya J.; Aoyama H.
	1994
发表期刊	Journal of Vacuum Science & Technology B
ISSN	1071-1023
卷号	12 期号:3 页码:1669-1672
摘要	A new scanning tunneling microscope (STM) and its application to surface roughness observation are described. Precision two-dimensional positioning of our STM instrument was achieved with a two-dimensional parallel spring driven by two stacked piezoelectric actuators (PZT), so that the mutual interference effect between x- and y-axis displacements is very small. The PZT for the z-axis displacement and control was mounted on the monolithic parallel spring. Therefore, the mutual interference effect of three-dimensional displacements is negligible. We have applied this STM to observation of surface roughness. A block gauge and a gold thin film evaporated on glass plates are observed at the constant-current mode and the zero bias voltage.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25987
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang H. C.,Sasaki A.,Fukaya J.,et al. SURFACE-ROUGHNESS OBSERVATION BY SCANNING-TUNNELING-MICROSCOPY USING A MONOLITHIC PARALLEL SPRING[J]. Journal of Vacuum Science & Technology B,1994,12(3):1669-1672.
APA	Zhang H. C.,Sasaki A.,Fukaya J.,&Aoyama H..(1994).SURFACE-ROUGHNESS OBSERVATION BY SCANNING-TUNNELING-MICROSCOPY USING A MONOLITHIC PARALLEL SPRING.Journal of Vacuum Science & Technology B,12(3),1669-1672.
MLA	Zhang H. C.,et al."SURFACE-ROUGHNESS OBSERVATION BY SCANNING-TUNNELING-MICROSCOPY USING A MONOLITHIC PARALLEL SPRING".Journal of Vacuum Science & Technology B 12.3(1994):1669-1672.

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