NANOMETER CHARACTERIZATION OF SINGLE-POINT DIAMOND-TURNED MIRRORS ON THE MICROMETER AND SUBMICROMETER SCALE

	NANOMETER CHARACTERIZATION OF SINGLE-POINT DIAMOND-TURNED MIRRORS ON THE MICROMETER AND SUBMICROMETER SCALE
其他题名	论文其他题名
	Yu J.; Hou L.; Ma W. S.; Cao J. L.; Yu J. Y.; Yao J. E.
	1994
发表期刊	Journal of Vacuum Science & Technology B
ISSN	1071-1023
卷号	12 期号:3 页码:1835-1838
摘要	Single point diamond turning (SPDT) is one of the nanometer machining methods. We deal with the nanometer characterization of diamond-turned mirrors on the micrometer and submicrometer scale with our three-dimensional roughness measuring system based on scanning tunneling microscopy. We have studied the results of amplitude spectral density functions for these surfaces. Finally, we have calculated the total integrated scattering as a function of incident light wavelength lambda and root mean square surface roughness sigma and the diffracted angle theta(d) as a function of the lambda and the surface spatial wavelength lambda(sp). All these measurement results are the basis for improving the SPDT surface quality.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25986
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yu J.,Hou L.,Ma W. S.,et al. NANOMETER CHARACTERIZATION OF SINGLE-POINT DIAMOND-TURNED MIRRORS ON THE MICROMETER AND SUBMICROMETER SCALE[J]. Journal of Vacuum Science & Technology B,1994,12(3):1835-1838.
APA	Yu J.,Hou L.,Ma W. S.,Cao J. L.,Yu J. Y.,&Yao J. E..(1994).NANOMETER CHARACTERIZATION OF SINGLE-POINT DIAMOND-TURNED MIRRORS ON THE MICROMETER AND SUBMICROMETER SCALE.Journal of Vacuum Science & Technology B,12(3),1835-1838.
MLA	Yu J.,et al."NANOMETER CHARACTERIZATION OF SINGLE-POINT DIAMOND-TURNED MIRRORS ON THE MICROMETER AND SUBMICROMETER SCALE".Journal of Vacuum Science & Technology B 12.3(1994):1835-1838.

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