Surface roughness characterization of soft x-ray multilayer films on the nanometer scale

	Surface roughness characterization of soft x-ray multilayer films on the nanometer scale
其他题名	论文其他题名
	Yu J.; Cao J. L.; Namba Y.; Ma Y. Y.
	1996
发表期刊	Journal of Vacuum Science & Technology B
ISSN	1071-1023
卷号	14 期号:1 页码:42-47
摘要	The soft x-ray reflectivity of multilayer films is affected by the surface roughness on the transverse nanometer scale. Scanning tunneling microscopy (STM) is an ideal instrument for providing high-lateral-resolution roughness measurements for soft x-ray multilayer films that cannot be obtained with other types of instruments on the transverse nanometer scale. The surface roughnesses of Mo/Si, Mo/C, and W/Si soft x-ray multilayer films prepared by an ion-beam-sputtering technique were measured with a STM on the vertical and transverse attributes. The film roughnesses and average spatial wavelengths added to the substrates depend on the multilayer film fabrication conditions, i.e., material combinations, number of layers, and individual layer thickness. These were estimated to lead to a loss of specular reflectivity and variations of the soft x-ray scattering angle distribution. This method points the way to further studies of soft x-ray multilayer film functional properties and can be used as basic guidance for selecting the best coating conditions in the fabrications of soft x-ray multilayer films. (C) 1996 American Vacuum Society.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25958
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yu J.,Cao J. L.,Namba Y.,et al. Surface roughness characterization of soft x-ray multilayer films on the nanometer scale[J]. Journal of Vacuum Science & Technology B,1996,14(1):42-47.
APA	Yu J.,Cao J. L.,Namba Y.,&Ma Y. Y..(1996).Surface roughness characterization of soft x-ray multilayer films on the nanometer scale.Journal of Vacuum Science & Technology B,14(1),42-47.
MLA	Yu J.,et al."Surface roughness characterization of soft x-ray multilayer films on the nanometer scale".Journal of Vacuum Science & Technology B 14.1(1996):42-47.

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