Design and fabrication of soft X-ray multilayer for broadband reflection

	Design and fabrication of soft X-ray multilayer for broadband reflection
其他题名	论文其他题名
	Wang Z. S.; Ke C. J.; Ma Y. Y.; Zhang T. Q.; Cao J. L.; Chen X. D.
	1999
发表期刊	Chinese Science Bulletin
ISSN	1001-6538
卷号	44 期号:21 页码:1953-1956
摘要	A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18-20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in integrated reflectance is obtained. The ensemble calculation is presented at the same time, and the multilayer is fabricated by magnetron sputtering. Finally low-angle X-ray diffraction and reflectance comparative measurement are used for testing the multilayer. The results demonstrate that layer thickness disorder yields band broadening and increased integrated reflectance in the spectral range with respect to periodic multilayer, but is accompanied by a reduction in reflectance peak. Layer thickness disorder makes it more difficult to fabricate broadband multilayer, and improving the techniques of layer thickness control is the keystone of experiments.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25934
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang Z. S.,Ke C. J.,Ma Y. Y.,et al. Design and fabrication of soft X-ray multilayer for broadband reflection[J]. Chinese Science Bulletin,1999,44(21):1953-1956.
APA	Wang Z. S.,Ke C. J.,Ma Y. Y.,Zhang T. Q.,Cao J. L.,&Chen X. D..(1999).Design and fabrication of soft X-ray multilayer for broadband reflection.Chinese Science Bulletin,44(21),1953-1956.
MLA	Wang Z. S.,et al."Design and fabrication of soft X-ray multilayer for broadband reflection".Chinese Science Bulletin 44.21(1999):1953-1956.

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