Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Design and fabrication of soft X-ray multilayer for broadband reflection | |
其他题名 | 论文其他题名 |
Wang Z. S.; Ke C. J.; Ma Y. Y.; Zhang T. Q.; Cao J. L.; Chen X. D. | |
1999 | |
发表期刊 | Chinese Science Bulletin |
ISSN | 1001-6538 |
卷号 | 44期号:21页码:1953-1956 |
摘要 | A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18-20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in integrated reflectance is obtained. The ensemble calculation is presented at the same time, and the multilayer is fabricated by magnetron sputtering. Finally low-angle X-ray diffraction and reflectance comparative measurement are used for testing the multilayer. The results demonstrate that layer thickness disorder yields band broadening and increased integrated reflectance in the spectral range with respect to periodic multilayer, but is accompanied by a reduction in reflectance peak. Layer thickness disorder makes it more difficult to fabricate broadband multilayer, and improving the techniques of layer thickness control is the keystone of experiments. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25934 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Wang Z. S.,Ke C. J.,Ma Y. Y.,et al. Design and fabrication of soft X-ray multilayer for broadband reflection[J]. Chinese Science Bulletin,1999,44(21):1953-1956. |
APA | Wang Z. S.,Ke C. J.,Ma Y. Y.,Zhang T. Q.,Cao J. L.,&Chen X. D..(1999).Design and fabrication of soft X-ray multilayer for broadband reflection.Chinese Science Bulletin,44(21),1953-1956. |
MLA | Wang Z. S.,et al."Design and fabrication of soft X-ray multilayer for broadband reflection".Chinese Science Bulletin 44.21(1999):1953-1956. |
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