Grazing emission X-ray fluorescence analysis for characteristics of film

	Grazing emission X-ray fluorescence analysis for characteristics of film
其他题名	论文其他题名
	Gong Y.; Chen B.; Ni Q. L.; Zhao H. Y.; Cao J. L.
	2003
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	23 期号:6 页码:1199-1202
摘要	Grazing emission X-ray fluorescence analysis is one of the important tools for the characterization of film in lab. In this paper, the principle and method are presented briefly for grazing emission X-ray fluorescence to analyze the thickness of the film. A set of equipment for film testing was set up in our laboratory, and its construction is described. The prototype setup is composed of a X-ray tube, a spectromenter and a gas-flow proportional counter with thin-film windows. The X-ray fluorescence produced by low Z element can be detected with this prototype setup. Meanwhile, the exit-angle dependence of the fluorescent X-ray intensity of some thin films with different thickness on Si substrates was demonstrated in theory, and the calculation results prove that the grazing emission X-ray fluorescence analysis is a good way to study the characteristics of film, such as the thickness of film.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25832
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Gong Y.,Chen B.,Ni Q. L.,et al. Grazing emission X-ray fluorescence analysis for characteristics of film[J]. Spectroscopy and Spectral Analysis,2003,23(6):1199-1202.
APA	Gong Y.,Chen B.,Ni Q. L.,Zhao H. Y.,&Cao J. L..(2003).Grazing emission X-ray fluorescence analysis for characteristics of film.Spectroscopy and Spectral Analysis,23(6),1199-1202.
MLA	Gong Y.,et al."Grazing emission X-ray fluorescence analysis for characteristics of film".Spectroscopy and Spectral Analysis 23.6(2003):1199-1202.

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