Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Effects of annealing on structural, optical and electrical properties of Al-doped ZnO thin films | |
其他题名 | 论文其他题名 |
Chen Y. W.; Yu W. H.; Liu Y. C. | |
2004 | |
发表期刊 | Science in China Series G-Physics Mechanics & Astronomy |
ISSN | 1672-1799 |
卷号 | 47期号:5页码:588-596 |
摘要 | In this paper, the structural, electrical and optical properties of Al-doped zinc oxide (ZnO:Al) thin films onto quartz substrates prepared by electron beam evaporation technique were studied. All samples are polycrystal with a hexagonal structure and c-axis preferred orientation. The intense UV emissions and weak deep-level green emissions were observed. The films show high transparency, conductivity and high carrier concentration. Van der Pauw measurements show that the films are n-type degenerate semiconductor. The lowest resistivity is 6.7x10(-4) Omega(.)cm at room temperature. These films exhibit a carrier density above 10(20) cm(-3). The conduction mechanism was discussed. The behavior of metallic conduction can be observed in the high temperature range. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25813 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Chen Y. W.,Yu W. H.,Liu Y. C.. Effects of annealing on structural, optical and electrical properties of Al-doped ZnO thin films[J]. Science in China Series G-Physics Mechanics & Astronomy,2004,47(5):588-596. |
APA | Chen Y. W.,Yu W. H.,&Liu Y. C..(2004).Effects of annealing on structural, optical and electrical properties of Al-doped ZnO thin films.Science in China Series G-Physics Mechanics & Astronomy,47(5),588-596. |
MLA | Chen Y. W.,et al."Effects of annealing on structural, optical and electrical properties of Al-doped ZnO thin films".Science in China Series G-Physics Mechanics & Astronomy 47.5(2004):588-596. |
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