The experiment study on the resolution of electro-optical Imaging system at EUV wave band

	The experiment study on the resolution of electro-optical Imaging system at EUV wave band
其他题名	论文其他题名
	Xue L. L.; Chen B.; Li Y. M.
	2004
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	24 期号:5 页码:529-531
摘要	An imaging system based on a Microchannel Plate(MCP) detector was designed to image the Extreme Utraviolet(EUV) light. The images of a 3 mm-width-slit were presented by this imaging system at the wavelengths of 13, 17.1, 19.5 and 30.4 nm respectively. Their corresponding spatial resolutions are 85, 120, 182 and 495 mum respectively. The best is 85 mum, corresponding to 13 nm. Moreover, the shorter the wavelength, the better the spatial resolution. So is the brightness of the image.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25802
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xue L. L.,Chen B.,Li Y. M.. The experiment study on the resolution of electro-optical Imaging system at EUV wave band[J]. Spectroscopy and Spectral Analysis,2004,24(5):529-531.
APA	Xue L. L.,Chen B.,&Li Y. M..(2004).The experiment study on the resolution of electro-optical Imaging system at EUV wave band.Spectroscopy and Spectral Analysis,24(5),529-531.
MLA	Xue L. L.,et al."The experiment study on the resolution of electro-optical Imaging system at EUV wave band".Spectroscopy and Spectral Analysis 24.5(2004):529-531.