Soft X-ray reflectometer with laser produced plasma source

	Soft X-ray reflectometer with laser produced plasma source
其他题名	论文其他题名
	Chen B.; Ni Q. L.; Cao J. H.
	2005
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	25 期号:3 页码:453-455
摘要	A soft X-ray reflectometor with laser-produced plasma source developed in the authorial lab is presented for the measurements of efficiencies of gratings, transmission of filter and reflectance of multilayer coatings. The reflectometer is composed of a soft X-ray laser-produced plasma source, a grazing incidence monochromator with a constant deviation angle, a vacuum chamber, a sample table, a photo-electronic unit and a computer controlling unit. The working wavelength is from 8 to 30 nm and the maximum sample size is 130 mm long by 120 mm wide by 120 mm high. In order to test the performances of the reflectometer, the reflectivity of multilayer coatings was obtained by using this device. The measured results agree well with the theoretical calculation. The reproducibility of measured reflectance is 0.6%.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25768
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Chen B.,Ni Q. L.,Cao J. H.. Soft X-ray reflectometer with laser produced plasma source[J]. Spectroscopy and Spectral Analysis,2005,25(3):453-455.
APA	Chen B.,Ni Q. L.,&Cao J. H..(2005).Soft X-ray reflectometer with laser produced plasma source.Spectroscopy and Spectral Analysis,25(3),453-455.
MLA	Chen B.,et al."Soft X-ray reflectometer with laser produced plasma source".Spectroscopy and Spectral Analysis 25.3(2005):453-455.

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