Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations

	Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations
其他题名	论文其他题名
	Xie B. C.; Lu Z. W.; Li F. Y.
	2005
发表期刊	Acta Physica Sinica
ISSN	1000-3290
卷号	54 期号:7 页码:3144-3148
摘要	The application of curved surface fitting for the disposal of the wavefront aberrations got in the measurement of certain paraboloid and hyperboloid is studied. It is found that, for mid-wavelength deformations with an amplitude of 0.1 lambda, results can be obtained with RMS error smaller than 0.015 lambda and 0.013 lambda separately. The existence of a special fitting order which leads to the smallest RMS error is affirmed. To find out the special fitting order, we work out two methods which help us get the order's value successfully.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25758
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xie B. C.,Lu Z. W.,Li F. Y.. Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations[J]. Acta Physica Sinica,2005,54(7):3144-3148.
APA	Xie B. C.,Lu Z. W.,&Li F. Y..(2005).Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations.Acta Physica Sinica,54(7),3144-3148.
MLA	Xie B. C.,et al."Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations".Acta Physica Sinica 54.7(2005):3144-3148.

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