Nitrogen partial pressure-dependent Mg concentration, structure, and optical properties of MgxZn1-xO film grown lay magnetron sputtering

	Nitrogen partial pressure-dependent Mg concentration, structure, and optical properties of MgxZn1-xO film grown lay magnetron sputtering
其他题名	论文其他题名
	Cong C. X.; Yao B.; Xie Y. P.; Xing G. Z.; Li B. H.; Wang X. H.; Wei Z. P.; Zhang Z. Z.; Lv Y. M.; Shen D. Z.; Fan X. W.
	2007
发表期刊	Journal of Materials Research
ISSN	0884-2914
卷号	22 期号:10 页码:2936-2942
摘要	MgxZn1-xO films were grown on quartz substrates at 773 K by using radio frequency magnetron sputtering with a mixture of argon and nitrogen as sputtering gases. The nitrogen concentration in the mixture is characterized by the nitrogen partial pressure ratio, which is determined by the ratio of nitrogen flow rate to the flow rates of nitrogen and argon. It was found that Mg concentration, structure, and band gap of the MgxZn1-xO film could be tuned by changing the nitrogen partial pressure ratio of the sputtering gases. The Mg concentration in the MgxZn1-xO film increases with increasing nitrogen partial pressure ratio. The MgxZn1-xO film consists of wurtzite phase at the ratios from 0% to 50%, mixture of wurtzite and cubic phases at the ratios between 50% and 83%, and cubic phase at 100%. The band gap of the MgxZn1-xO film with wurtzite and cubic structure increases as the ratio rises. The variation of the structure and band gap is attributed to change of the Mg concentration, which results from loss of the O and Zn atoms during growth process, the former is induced by reaction between N and O, and the latter by re-evaporation of Zn atoms due to high substrate temperature. The mechanism of the loss of the O and Zn atoms is discussed based on thermodynamics.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25724
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Cong C. X.,Yao B.,Xie Y. P.,et al. Nitrogen partial pressure-dependent Mg concentration, structure, and optical properties of MgxZn1-xO film grown lay magnetron sputtering[J]. Journal of Materials Research,2007,22(10):2936-2942.
APA	Cong C. X..,Yao B..,Xie Y. P..,Xing G. Z..,Li B. H..,...&Fan X. W..(2007).Nitrogen partial pressure-dependent Mg concentration, structure, and optical properties of MgxZn1-xO film grown lay magnetron sputtering.Journal of Materials Research,22(10),2936-2942.
MLA	Cong C. X.,et al."Nitrogen partial pressure-dependent Mg concentration, structure, and optical properties of MgxZn1-xO film grown lay magnetron sputtering".Journal of Materials Research 22.10(2007):2936-2942.

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