The Spectra of a Laser-Produced Plasma Source with CO(2), O(2) and CF(4) Liquid Aerosol Spray Target

	The Spectra of a Laser-Produced Plasma Source with CO(2), O(2) and CF(4) Liquid Aerosol Spray Target
其他题名	论文其他题名
	Ni Q. L.; Chen B.
	2008
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	28 期号:11 页码:2465-2468
摘要	A laser-produced plasma (LPP) source with liquid aerosol spray target and nanosecond laser was developed, based on both soft X-ray radiation metrology and extreme ultraviolet projection lithography (EUVL). The LPP source is composed of a stainless steel solenoid valve whose temperature can be continuously controlled, a Nd : YAG laser with pulse width, working wavelength and pulse energy being 7 ns, 1.064 mu m and 1J respectively, and a pulse generator which can synchronously control the valve and the laser. A standard General Valve Corporation series 99 stainless steel solenoid valve with copper gasket seals and a Kel-F poppet are used in order to minimize leakage and poppet deformation during high-pressure cryogenic operation. A close fitting copper cooling jacket surrounds the valve body. The jacket clamps a copper coolant-carrying tube 3 nun in diameter, which is fed by an automatically pressurized liquid nitrogen-filled dewar. The valve temperature can be controlled between 77 and 473 K For sufficiently high backing pressure and low temperature, the valve reservoir gas can undergo a gas-to-liquid phase transition. Upon valve pulsing, the liquid is ejected into a vacuum and breaks up into droplets, which is called liquid aerosol spray target. For the above-mentioned LPP source, firstly, by the use of Cowan program on the basis of non-relativistic quantum mechanics, the authors computed the radiative transition wavelengths and probabilities in soft X-ray region for O(4+), O(5+), O(6+), O(7+), F(5+), F(6+) and F(7+) ions which were correspondingly produced from the interaction of the 10(11)-10(12) W . cm(-2) power laser with liquid O(2), CO(2) and CF(4) aerosol spray targets. Secondly, the authors measured the spectra of liquid O(2), CO(2) and CF(4) aerosol spray target LPP sources in the 6-20 run band for the 8 x 10(11) W . cm(-2) laser irradiance. The measured results were compared with the Cowan calculated results ones, and the radiative transition wavelength and probability for the measured spectral lines were obtained.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25693
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ni Q. L.,Chen B.. The Spectra of a Laser-Produced Plasma Source with CO(2), O(2) and CF(4) Liquid Aerosol Spray Target[J]. Spectroscopy and Spectral Analysis,2008,28(11):2465-2468.
APA	Ni Q. L.,&Chen B..(2008).The Spectra of a Laser-Produced Plasma Source with CO(2), O(2) and CF(4) Liquid Aerosol Spray Target.Spectroscopy and Spectral Analysis,28(11),2465-2468.
MLA	Ni Q. L.,et al."The Spectra of a Laser-Produced Plasma Source with CO(2), O(2) and CF(4) Liquid Aerosol Spray Target".Spectroscopy and Spectral Analysis 28.11(2008):2465-2468.

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