Simulation and fabrication of flexible cantilever electromagnet actuated optical switch

	Simulation and fabrication of flexible cantilever electromagnet actuated optical switch
其他题名	论文其他题名
	Xu D. W.; Liang Z. Z.; Liang J. Q.; Li W.; Li X. Q.; Sun Z. D.; Wang W. B.
	2010
发表期刊	Acta Physica Sinica
ISSN	1000-3290
卷号	59 期号:4 页码:2479-2484
摘要	A kind of flexible cantilever beam electromagnetic optical switch which is used in the wave length channel selection system was designed and fabricated. It was manufactured by micro-opto-eleetromechanical system technology and composed of a plane circular coil in flexible polyimide cantilever beam, a cylindrical permanent in,the substrate and a reflector prism with two reflecting surfaces. The switch's motion depends on the current direction in the cods. The simulation of force between the cods and the permanent magnet was proceeded by finite element method. In the same way, the relationship between cantilever's deflection and restoring force, and electromagnetic force were obtained The switch's actuation performance was tested and the results indicate that deflection of the cantilever is 0.925 mm with 0. 15 A current input, which satisfies the need of the wave length channel selection system of changing the propagation direction of the optical beam.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25633
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xu D. W.,Liang Z. Z.,Liang J. Q.,et al. Simulation and fabrication of flexible cantilever electromagnet actuated optical switch[J]. Acta Physica Sinica,2010,59(4):2479-2484.
APA	Xu D. W..,Liang Z. Z..,Liang J. Q..,Li W..,Li X. Q..,...&Wang W. B..(2010).Simulation and fabrication of flexible cantilever electromagnet actuated optical switch.Acta Physica Sinica,59(4),2479-2484.
MLA	Xu D. W.,et al."Simulation and fabrication of flexible cantilever electromagnet actuated optical switch".Acta Physica Sinica 59.4(2010):2479-2484.

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