Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer

	Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer
其他题名	论文其他题名
	Wang B.; Liang Z. Z.; Kong Y. M.; Liang J. Q.; Fu J. G.; Zheng Y.; Zhu W. B.; Lu J. G.; Wang W. B.; Pei S.; Zhang J.
	2010
发表期刊	Acta Physica Sinica
ISSN	1000-3290
卷号	59 期号:2 页码:907-912
摘要	A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed, and the interference system is introduced. The fabrication of the micro multi-mirrors, which is the core part of the system, is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes (111) through wet etching is less than 10 nm.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25632
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang B.,Liang Z. Z.,Kong Y. M.,et al. Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer[J]. Acta Physica Sinica,2010,59(2):907-912.
APA	Wang B..,Liang Z. Z..,Kong Y. M..,Liang J. Q..,Fu J. G..,...&Zhang J..(2010).Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer.Acta Physica Sinica,59(2),907-912.
MLA	Wang B.,et al."Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer".Acta Physica Sinica 59.2(2010):907-912.

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