Analysts of residual fabrication errors for computer controlled polishing aspherical mirrors

	Analysts of residual fabrication errors for computer controlled polishing aspherical mirrors
其他题名	论文其他题名
	Zhang X. J.; Yu J. C.; Zhang Z. Y.; Wang Q. D.; Zheng W. P.
	1997
发表期刊	Optical Engineering
ISSN	0091-3286
卷号	36 期号:12 页码:3386-3391
摘要	A quantitative expression for residual errors and mid-spatial-frequency errors of the aspherical surface finished by computer controlled polishing (CCP) is discussed in terms of the power spectral density model, The relationship between the magnitude of these errors and the CCP parameters is investigated using experimentation. An optimized CCP process is presented to reduce the residual surface errors. By properly choosing the polishing parameters such as tool size and lap material the residual errors can be removed. The final surface error of a hyperbolic mirror has reached 0.038 wave rms with residual errors less than 0.018 wave rms. (C) 1997 Society of Photo-Optical instrumentation Engineers.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25414
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang X. J.,Yu J. C.,Zhang Z. Y.,et al. Analysts of residual fabrication errors for computer controlled polishing aspherical mirrors[J]. Optical Engineering,1997,36(12):3386-3391.
APA	Zhang X. J.,Yu J. C.,Zhang Z. Y.,Wang Q. D.,&Zheng W. P..(1997).Analysts of residual fabrication errors for computer controlled polishing aspherical mirrors.Optical Engineering,36(12),3386-3391.
MLA	Zhang X. J.,et al."Analysts of residual fabrication errors for computer controlled polishing aspherical mirrors".Optical Engineering 36.12(1997):3386-3391.

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