Range and thermal behaviour studies of Tm+, Er+ and Yb+ implanted into LiNbO3 and quartz crystal

	Range and thermal behaviour studies of Tm+, Er+ and Yb+ implanted into LiNbO3 and quartz crystal
其他题名	论文其他题名
	Wang K. M.; Meng M. Q.; Lu F.; Liu X. D.; Liu J. T.; Zhang Q. H.; Li Y.; Li J. S.
	1997
发表期刊	Materials Science and Engineering B-Solid State Materials for Advanced Technology
ISSN	0921-5107
卷号	47 期号:2 页码:150-154
摘要	Tm+, Er+ and Yb+ have been implanted into LiNbO3 and quartz crystal (SiO2) in the energy range 100-400 keV. The profile of implanted ions was measured by Rutherford backscattering of MeV He ions. The mean projected range and range straggling obtained were compared with TRIM code. The result shows that (1) The mean projected range and range straggling are in well agreement with TRIM prediction except for 100 keV for LiNbO3 (2) The mean projected range is in good agreement with TRIM prediction within 8%, but the experimental range straggling is higher than the calculated value by TRIM code for quartz crystal. After 800 degrees C annealing for 30 min, it is found that there is no obvious diffusion for the case of 300 keV Er+, but for the case of 300 keV Yb+ the diffusion occurs and the diffusion coefficient D estimated is 2.77 x 10(-15) cm(2) s(-1). (C) 1997 Elsevier Science S.A.
收录类别	SCI
语种	英语
WOS记录号	WOS:A1997XM39900010
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25378
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang K. M.,Meng M. Q.,Lu F.,et al. Range and thermal behaviour studies of Tm+, Er+ and Yb+ implanted into LiNbO3 and quartz crystal[J]. Materials Science and Engineering B-Solid State Materials for Advanced Technology,1997,47(2):150-154.
APA	Wang K. M..,Meng M. Q..,Lu F..,Liu X. D..,Liu J. T..,...&Li J. S..(1997).Range and thermal behaviour studies of Tm+, Er+ and Yb+ implanted into LiNbO3 and quartz crystal.Materials Science and Engineering B-Solid State Materials for Advanced Technology,47(2),150-154.
MLA	Wang K. M.,et al."Range and thermal behaviour studies of Tm+, Er+ and Yb+ implanted into LiNbO3 and quartz crystal".Materials Science and Engineering B-Solid State Materials for Advanced Technology 47.2(1997):150-154.

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