A low debris laser plasma soft X-ray source

	A low debris laser plasma soft X-ray source
其他题名	论文其他题名
	Lin J. Q.; Song X. W.; Chen B.; Cao J. L.
	2000
发表期刊	Optics and Laser Technology
ISSN	0030-3992
卷号	32 期号:2 页码:117-119
摘要	Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 mu m YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO2 cryogenic target. Soft X-ray spectra from the CO2 cryogenic target are obtained. Experimental results of debris measurement from both CO2 cryogenic and Cu targets demonstrate that the light source based on the CO2 cryogenic target shows great improvement over conventional metal targets in debris reduction. (C) 2000 Elsevier Science Ltd. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25272
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lin J. Q.,Song X. W.,Chen B.,et al. A low debris laser plasma soft X-ray source[J]. Optics and Laser Technology,2000,32(2):117-119.
APA	Lin J. Q.,Song X. W.,Chen B.,&Cao J. L..(2000).A low debris laser plasma soft X-ray source.Optics and Laser Technology,32(2),117-119.
MLA	Lin J. Q.,et al."A low debris laser plasma soft X-ray source".Optics and Laser Technology 32.2(2000):117-119.