Changchun Institute of Optics,Fine Mechanics and Physics,CAS
A low debris laser plasma soft X-ray source | |
其他题名 | 论文其他题名 |
Lin J. Q.; Song X. W.; Chen B.; Cao J. L. | |
2000 | |
发表期刊 | Optics and Laser Technology
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ISSN | 0030-3992 |
卷号 | 32期号:2页码:117-119 |
摘要 | Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 mu m YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO2 cryogenic target. Soft X-ray spectra from the CO2 cryogenic target are obtained. Experimental results of debris measurement from both CO2 cryogenic and Cu targets demonstrate that the light source based on the CO2 cryogenic target shows great improvement over conventional metal targets in debris reduction. (C) 2000 Elsevier Science Ltd. All rights reserved. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25272 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Lin J. Q.,Song X. W.,Chen B.,et al. A low debris laser plasma soft X-ray source[J]. Optics and Laser Technology,2000,32(2):117-119. |
APA | Lin J. Q.,Song X. W.,Chen B.,&Cao J. L..(2000).A low debris laser plasma soft X-ray source.Optics and Laser Technology,32(2),117-119. |
MLA | Lin J. Q.,et al."A low debris laser plasma soft X-ray source".Optics and Laser Technology 32.2(2000):117-119. |
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