Surface morphology study on chromium oxide growth on Cr films by Nd-YAG laser oxidation process

	Surface morphology study on chromium oxide growth on Cr films by Nd-YAG laser oxidation process
其他题名	论文其他题名
	Dong Q. Z.; Hu J. D.; Guo Z. X.; Lian J. S.; Chen J. W.; Chen B.
	2002
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	202 期号:1—2 页码:114-119
摘要	Grain sized (60-100 nm) Cr2O3 thin films were prepared on Cr thin film surfaces by Nd-YAG laser photothermal oxidation process. Surface morphology study showed crack-free short plateau-like oxide films formed. Increase of dislocation density after pulsed laser irradiation was found. Thin film external surfaces, grain boundaries and dislocations are main paths of laser surface oxidation. Pinning and sealing of grain boundary was the reason that deeper oxidation did not produce. Grain growth and agglomeration of Cr sub-layer yielded tensile stress on the surface Cr2O3 thin film. It was the reason that short plateau-like surface morphology formed and cracks appeared sometimes. In oxygen annealing at 700 degreesC, grain boundaries were considered not to be pinned at the surface, mixture diffusion was main mechanism in growth of oxide. Compression stress development in whole film led to extrusion of grains that was the reason that multiple appearances such as pyramid-like and nutshell-like morphology formed. (C) 2002 Elsevier Science B.V. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25206
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Dong Q. Z.,Hu J. D.,Guo Z. X.,et al. Surface morphology study on chromium oxide growth on Cr films by Nd-YAG laser oxidation process[J]. Applied Surface Science,2002,202(1—2):114-119.
APA	Dong Q. Z.,Hu J. D.,Guo Z. X.,Lian J. S.,Chen J. W.,&Chen B..(2002).Surface morphology study on chromium oxide growth on Cr films by Nd-YAG laser oxidation process.Applied Surface Science,202(1—2),114-119.
MLA	Dong Q. Z.,et al."Surface morphology study on chromium oxide growth on Cr films by Nd-YAG laser oxidation process".Applied Surface Science 202.1—2(2002):114-119.

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