Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Method for correcting the joint error of a laser writer | |
其他题名 | 论文其他题名 |
Xie Y. J.; Lu Z. W.; Li F.![]() | |
2003 | |
发表期刊 | Optics Express
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ISSN | 1094-4087 |
卷号 | 11期号:9页码:975-979 |
摘要 | We present what we believe to be a new method for correcting the joint error of a laser writer without reduction of throughput. By digitization, we optimize the intensity data of the incident beam at the vicinity of the start point and the end point. The joint error will not be sensitive to lengthening of the start or end point by optimization. The advantage of this method over multipass writing and error scattering is that it requires only a single pass, and thus 80% of the fabrication time will be saved. Experimentation shows the method to be effective. (C) 2003 Optical Society of America. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25117 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Xie Y. J.,Lu Z. W.,Li F.. Method for correcting the joint error of a laser writer[J]. Optics Express,2003,11(9):975-979. |
APA | Xie Y. J.,Lu Z. W.,&Li F..(2003).Method for correcting the joint error of a laser writer.Optics Express,11(9),975-979. |
MLA | Xie Y. J.,et al."Method for correcting the joint error of a laser writer".Optics Express 11.9(2003):975-979. |
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