Method for correcting the joint error of a laser writer

	Method for correcting the joint error of a laser writer
其他题名	论文其他题名
	Xie Y. J.; Lu Z. W.; Li F.
	2003
发表期刊	Optics Express
ISSN	1094-4087
卷号	11 期号:9 页码:975-979
摘要	We present what we believe to be a new method for correcting the joint error of a laser writer without reduction of throughput. By digitization, we optimize the intensity data of the incident beam at the vicinity of the start point and the end point. The joint error will not be sensitive to lengthening of the start or end point by optimization. The advantage of this method over multipass writing and error scattering is that it requires only a single pass, and thus 80% of the fabrication time will be saved. Experimentation shows the method to be effective. (C) 2003 Optical Society of America.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25117
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xie Y. J.,Lu Z. W.,Li F.. Method for correcting the joint error of a laser writer[J]. Optics Express,2003,11(9):975-979.
APA	Xie Y. J.,Lu Z. W.,&Li F..(2003).Method for correcting the joint error of a laser writer.Optics Express,11(9),975-979.
MLA	Xie Y. J.,et al."Method for correcting the joint error of a laser writer".Optics Express 11.9(2003):975-979.