Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Field emission characteristics of BN films with cubic-BN phase | |
其他题名 | 论文其他题名 |
Gu G. R.; Wu B. J.; Jin Z.; Sun L.![]() | |
2004 | |
发表期刊 | Chinese Physics Letters
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ISSN | 0256-307X |
卷号 | 21期号:3页码:565-567 |
摘要 | Boron nitride (BN) thin films with cubic boron nitride (c-BN) phase were prepared on the (100)-oriented surface of n-Si (0.008-0.02Omegam) by rf magnetron sputtering physical vapor deposition. The c-BN content is determined to be around 50% by using Fourier transform infrared spectroscopy for the BN thin films. The field emission characteristics of BN films were measured in an ultrahigh vacuum system. It is found that the field emission of the BN film with c-BN phase is evidently more excellent than that without c-BN phase. A turn-on field of 5 V/mum and a current of 460 muA/cm(2) were obtained for the BN film with c-BN phase. The Fowler-Nordheim plots of emission characteristics of BN films indicate a straight line, which suggests the presence of the FN tunneling. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25097 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Gu G. R.,Wu B. J.,Jin Z.,et al. Field emission characteristics of BN films with cubic-BN phase[J]. Chinese Physics Letters,2004,21(3):565-567. |
APA | Gu G. R..,Wu B. J..,Jin Z..,Sun L..,Li J. J..,...&Wang W. B..(2004).Field emission characteristics of BN films with cubic-BN phase.Chinese Physics Letters,21(3),565-567. |
MLA | Gu G. R.,et al."Field emission characteristics of BN films with cubic-BN phase".Chinese Physics Letters 21.3(2004):565-567. |
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