Field emission characteristics of BN films with cubic-BN phase

	Field emission characteristics of BN films with cubic-BN phase
其他题名	论文其他题名
	Gu G. R.; Wu B. J.; Jin Z.; Sun L.; Li J. J.; Zhao Y. N.; Wang B.; Yan H.; Wang W. B.
	2004
发表期刊	Chinese Physics Letters
ISSN	0256-307X
卷号	21 期号:3 页码:565-567
摘要	Boron nitride (BN) thin films with cubic boron nitride (c-BN) phase were prepared on the (100)-oriented surface of n-Si (0.008-0.02Omegam) by rf magnetron sputtering physical vapor deposition. The c-BN content is determined to be around 50% by using Fourier transform infrared spectroscopy for the BN thin films. The field emission characteristics of BN films were measured in an ultrahigh vacuum system. It is found that the field emission of the BN film with c-BN phase is evidently more excellent than that without c-BN phase. A turn-on field of 5 V/mum and a current of 460 muA/cm(2) were obtained for the BN film with c-BN phase. The Fowler-Nordheim plots of emission characteristics of BN films indicate a straight line, which suggests the presence of the FN tunneling.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25097
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Gu G. R.,Wu B. J.,Jin Z.,et al. Field emission characteristics of BN films with cubic-BN phase[J]. Chinese Physics Letters,2004,21(3):565-567.
APA	Gu G. R..,Wu B. J..,Jin Z..,Sun L..,Li J. J..,...&Wang W. B..(2004).Field emission characteristics of BN films with cubic-BN phase.Chinese Physics Letters,21(3),565-567.
MLA	Gu G. R.,et al."Field emission characteristics of BN films with cubic-BN phase".Chinese Physics Letters 21.3(2004):565-567.

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