Study of a 2 x 2 MOEMS optical switch with electrostatic actuating

	Study of a 2 x 2 MOEMS optical switch with electrostatic actuating
其他题名	论文其他题名
	Sun D. M.; Dong W.; Wang G. D.; Liu C. X.; Yan X.; Xu B. K.; Chen W. Y.
	2005
发表期刊	Sensors and Actuators a-Physical
ISSN	0924-4247
卷号	120 期号:1 页码:249-256
摘要	Based on the torsion dynamic theory, the method and relative formulae are presented for analyzing the actuating voltage and the switching time, on which the effect of the air squeeze film damping is already considered, for a 2 x 2 MOEMS optical switch with electrostatic actuating. The computed results show that the switching time will increase markedly under considering the air damping. Furthermore, an optical technique is described for the measurement of the actuating voltage and switching time of the device. Theoretical and experimental results obtained demonstrate the feasibility of the proposed method. The actuating voltage is about 50 V, and the switching time T-off and T-on are about 4.8 and 12.5 ms, respectively. (c) 2004 Elsevier B.V. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25022
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Sun D. M.,Dong W.,Wang G. D.,et al. Study of a 2 x 2 MOEMS optical switch with electrostatic actuating[J]. Sensors and Actuators a-Physical,2005,120(1):249-256.
APA	Sun D. M..,Dong W..,Wang G. D..,Liu C. X..,Yan X..,...&Chen W. Y..(2005).Study of a 2 x 2 MOEMS optical switch with electrostatic actuating.Sensors and Actuators a-Physical,120(1),249-256.
MLA	Sun D. M.,et al."Study of a 2 x 2 MOEMS optical switch with electrostatic actuating".Sensors and Actuators a-Physical 120.1(2005):249-256.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Sun-2005-Study of a （410KB）			开放获取	--	浏览下载