Investigation of growth mode in ZnO thin films prepared at different temperature by plasma-molecular beam epitaxy

	Investigation of growth mode in ZnO thin films prepared at different temperature by plasma-molecular beam epitaxy
其他题名	论文其他题名
	Liang H. W.; Lu Y. M.; Shen D. Z.; Yan J. F.; Li B. H.; Zhang J. Y.; Liu Y. C.; Fan X. W.
	2005
发表期刊	Journal of Crystal Growth
ISSN	0022-0248
卷号	278 期号:1—4 页码:305-310
摘要	High-quality ZnO thin films on c-plane sapphire (Al2O3) substrates were prepared by plasma-molecular beam epitaxy (P-MBE). The influence of growth temperature on growth mode of ZnO was investigated. Real-time monitored by reflection high-energy electron diffraction (RHEED) images show that, below 500&DEG; C, ZnO thin film was grown by three-dimension (3D) growth mode. While the two-dimension (2D) growth mode was obtained above growth temperature of 650 &DEG; C. Atomic force microscopy (AFM) images present that the surface morphology of ZnO thin film with (2D) growth is improved and X-ray rocking curves (XRC) indicate that the full width at half maximum (FWHM) of the ZnO (002) peak becomes narrow. From the photoluminescence (PL) spectra, ultraviolet (UV) emission peak exhibits obvious blue-shift for the samples grown at lower temperature, which is attributed to the effect of the quantum confinement arisen from small crystal grain sizes. The minimum carrier concentration of N = 7.66 x 10(16) cm(-3) was obtained in the ZnO thin films with the 2D grown, which is closed to that of bulk ZnO. © 2005 Elsevier B.V. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25013
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liang H. W.,Lu Y. M.,Shen D. Z.,et al. Investigation of growth mode in ZnO thin films prepared at different temperature by plasma-molecular beam epitaxy[J]. Journal of Crystal Growth,2005,278(1—4):305-310.
APA	Liang H. W..,Lu Y. M..,Shen D. Z..,Yan J. F..,Li B. H..,...&Fan X. W..(2005).Investigation of growth mode in ZnO thin films prepared at different temperature by plasma-molecular beam epitaxy.Journal of Crystal Growth,278(1—4),305-310.
MLA	Liang H. W.,et al."Investigation of growth mode in ZnO thin films prepared at different temperature by plasma-molecular beam epitaxy".Journal of Crystal Growth 278.1—4(2005):305-310.

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