Surface oxidation kinetics of Cr film by Nd-YAG laser

	Surface oxidation kinetics of Cr film by Nd-YAG laser
其他题名	论文其他题名
	Lian J. S.; Dong Q. Z.; Guo Z. X.; Xu Q.; Yang J.; Hu J. D.; Guan Q. F.; Chen B.
	2005
发表期刊	Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing
ISSN	0921-5093
卷号	391 期号:1—2 页码:210-220
摘要	Surface microstructures of Cr films by Nd-YAG laser oxidation and annealing oxidation were studied by SEM, FESEM, AFM and XRD. Cr films with different grain sizes varying from 30 to 200 nm were obtained with the change of laser parameters. The calculated activation energy is of 1.13 eV and it was less than the lattice diffusion activation energy. Fick's law and average field method was applied to simulate the laser oxidation kinetics in Cr films. The differential form of homogeneous grain growth formula at equivalent constant temperature was used to establish laser oxidation kinetics. The inverse logarithm relation between oxidation rate and laser acting time was observed when the grain sizes of film were in 100-200 nm and it complied with Wagner theory and the parabola kinetics curve. The oxidation kinetics complied with Carbrea-Mott theory when the oxide film grain sizes were less than 100 nm. Cabrera-Mott oxidation kinetics was applied to not only the grain sizes within 10 nm, but also the grain sizes up to 100 nm. This result filled up the blank in the oxidation kinetics with grains sized of 10-100 nm. These results from the laser enhanced desorption which could reach rather deeper layer in the film under laser oxidation. (C) 2004 Elsevier B.V All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24997
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lian J. S.,Dong Q. Z.,Guo Z. X.,et al. Surface oxidation kinetics of Cr film by Nd-YAG laser[J]. Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing,2005,391(1—2):210-220.
APA	Lian J. S..,Dong Q. Z..,Guo Z. X..,Xu Q..,Yang J..,...&Chen B..(2005).Surface oxidation kinetics of Cr film by Nd-YAG laser.Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing,391(1—2),210-220.
MLA	Lian J. S.,et al."Surface oxidation kinetics of Cr film by Nd-YAG laser".Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing 391.1—2(2005):210-220.

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