The con-focal method on verifying focal plane of MAS machine

	The con-focal method on verifying focal plane of MAS machine
其他题名	论文其他题名
	Huang W.; Cerrina F.
	2007
发表期刊	Optics Express
ISSN	1094-4087
卷号	15 期号:3 页码:872-877
摘要	The Maskless DNA Array Synthesizer (MAS) is very efficient and flexible device on custom designed DNA array fabricating. To make the MAS's focal plane keep stable is important during the chip synthesizing process. In this paper we bring a creative idea using con-focal method to verify focal plane of MAS machine. That method is very sensitive on focal plane verification and could be used on other optical lithography system or the projecting system, which need real time focal plane precision control. (c) 2007 Optical Society of American.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24883
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Huang W.,Cerrina F.. The con-focal method on verifying focal plane of MAS machine[J]. Optics Express,2007,15(3):872-877.
APA	Huang W.,&Cerrina F..(2007).The con-focal method on verifying focal plane of MAS machine.Optics Express,15(3),872-877.
MLA	Huang W.,et al."The con-focal method on verifying focal plane of MAS machine".Optics Express 15.3(2007):872-877.