Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate

	Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate
其他题名	论文其他题名
	Song Q.; Gao J. S.; Wang X. Y.; Wang T. T.; Meng L. J.; Chen H.; Zheng X. M.; Li C. R.; Song C. L.
	2007
发表期刊	Optics Communications
ISSN	0030-4018
卷号	271 期号:1 页码:137-141
摘要	We analyze the effect of the laser annealing on the crystallization of Er3+ doped amorphous Al2O3 thin films deposited on the silica-on-silicon substrate. These thin films were prepared by the microwave electron cyclotron resonance plasma source and were annealed by pulse CO2 laser. The Gauss intensity distribution of laser beam was mended at 3 x f position in the collimation system. Strong crystallization occurred in Al2O3 thin films and liquid phase crystallization was proposed to appear with the increase of laser powers. Photoluminescence intensity enhancement by a factor of 47 around 1.53 mu m has been realized by laser annealing process and Raman spectra study has suggested that Er3+ emission centers excited by Si nanocrystal (Si-nc) were formed in the Al2O3-SiO2 materials. The dual wavelength energy transfer mechanism between 800 nm and 980 nm is proposed in Er-doped Si-nc in Al2O3-SiO2 thin films. (c) 2006 Elsevier B.V. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24874
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song Q.,Gao J. S.,Wang X. Y.,et al. Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate[J]. Optics Communications,2007,271(1):137-141.
APA	Song Q..,Gao J. S..,Wang X. Y..,Wang T. T..,Meng L. J..,...&Song C. L..(2007).Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate.Optics Communications,271(1),137-141.
MLA	Song Q.,et al."Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate".Optics Communications 271.1(2007):137-141.

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